If a worker wants to do something good, he must first sharpen his tools. In today's globalization, patents are not only a means of protection for innovation, but have become a weapon in the commercial battlefield. Mames Consulting has created a patent operation platform for MEMS, sensors and IoT, integrated intellectual property resources in the entire industry chain, and actively promoted the protection and effective use of intellectual property. THz (terahertz) imaging is one of the important application directions of THz technology. In 1995, BBHu and MCNuss used THz time-domain spectroscopy system to realize scanning imaging of fresh leaves and integrated circuits, which is regarded as a milestone in the field of THz imaging. The intuitive and clear transmission scan image demonstrates the enormous potential of THz waves in the field of imaging. In particular, the potential of THz QCL developed by infrared quantum cascade laser (QCL) has attracted wide attention. These devices have high output power, good single frequency and small size and easy integration. And other characteristics, as a THz source is used by various imaging technologies and systems.
The THz wave is between millimeter wave and infrared light. Compared with millimeter wave or microwave imaging, THz wave imaging can achieve higher resolution because THz wave has shorter wavelength; THz wave can penetrate compared with infrared. Many infrared-impermeable materials, such as paper, plastic, ceramics, and semiconductors, complete imaging of hidden targets; THz waves have lower energy than X-rays, which are widely used in medical imaging and security imaging. (1THz ~ 4meV), can make up for the obvious shortcomings of X-rays easily causing radiation damage to the human body. At the same time, the contrast of low-density materials is better than X-ray. Based on the above advantages, THz imaging applications mainly involve hidden target detection. Security imaging, non-destructive testing and cancerous tissue identification.
The development trend of terahertz imaging for security THz imaging is to develop a more practical THz imaging detection device, which is constantly moving towards real-time, high-resolution, long-distance and portable. The technical means adopted mainly include: optimized scanning mode, synthetic aperture technology and array receiving technology. In the new THz imaging technology, THz QCL-based imaging technology is one of the important development directions in the future THz imaging field. For the existing terahertz imaging system, since the beam splitter is disposed between the detector and the transmission optical path, the terahertz light entering the detector is first reflected by the beam splitter, thereby greatly reducing the intensity of the incident signal, resulting in The signal has a large interference, and the collection efficiency of the incident signal also drops sharply.
[Recommended invention patent] "THz imaging system and imaging method" [Invention] The present invention provides a terahertz two-dimensional imaging system and an imaging method for solving the incident of entering the detector in the existing imaging system. The problem is low signal strength, large interference, and low collection efficiency.
System block diagram of the imaging system of the present invention
The structure of the terahertz quantum cascade laser module and the optical path transmission path of the invention The terahertz two-dimensional imaging system of the invention not only realizes the direct emission of the laser module by placing the first mirror body in the light exit port of the terahertz quantum cascade laser. Terahertz light also reduces the size and complexity of the imaging system; and by reducing the terahertz light transmitted to the optical path transmission module to a parallel terahertz beam, the loss of light is greatly reduced. In addition, by incorporating the second mirror body with the front end of the detector, not only the convergence of the terahertz light is achieved, but also the volume and complexity of the imaging system are further reduced.
Moreover, the transmission path of the terahertz light is reset by the terahertz quantum cascade laser module, the stage module, the optical path transmission module and the data acquisition module, thereby avoiding the use of the splitter, reducing the light loss and the beam interference. The imaging signal-to-noise ratio is improved. Finally, the terahertz light incident on the data acquisition module is set as a parallel terahertz beam by the optical path transmission module, which increases the collection efficiency of the detector and improves the signal intensity and imaging effect.
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